JPH0255036U - - Google Patents
Info
- Publication number
- JPH0255036U JPH0255036U JP13331688U JP13331688U JPH0255036U JP H0255036 U JPH0255036 U JP H0255036U JP 13331688 U JP13331688 U JP 13331688U JP 13331688 U JP13331688 U JP 13331688U JP H0255036 U JPH0255036 U JP H0255036U
- Authority
- JP
- Japan
- Prior art keywords
- air
- clean room
- chamber
- supply port
- air supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001143 conditioned effect Effects 0.000 claims description 5
- 239000012465 retentate Substances 0.000 claims description 3
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13331688U JPH0444980Y2 (en]) | 1988-10-12 | 1988-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13331688U JPH0444980Y2 (en]) | 1988-10-12 | 1988-10-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0255036U true JPH0255036U (en]) | 1990-04-20 |
| JPH0444980Y2 JPH0444980Y2 (en]) | 1992-10-22 |
Family
ID=31391066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13331688U Expired JPH0444980Y2 (en]) | 1988-10-12 | 1988-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0444980Y2 (en]) |
-
1988
- 1988-10-12 JP JP13331688U patent/JPH0444980Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0444980Y2 (en]) | 1992-10-22 |